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Publications
Proceedings
2017 Metabolic Engineering Summit
General Submissions
ME as an Enabling Technology for Driving Innovation
Impact of yeast lipid pathway engineering and bioprocess strategy on cellular physiology and lipid content
2007 Annual Meeting
Session: Plasma Processing
Chair
Donnelly, V. M.
, University of Houston
Co-Chair
Agarwal, S.
, Colorado School of Mines
Presentations
12:30 PM
(258a) In Situ Measurement Of The Ion Incidence Angle Dependence Of The Ion-Enhanced Etching Yield In Plasma Reactors
12:50 PM
(258b) Prediction Of Feature Profile Evolution In Shallow Trench Isolation Etching
01:10 PM
(258c) The Effect Of Oxygen Addition In A Chlorine Plasma During Shallow Trench Isolation Etch
01:30 PM
(258d) The Effect Of Polymerizing Chemistry And Ion Flux On Oxide Fencing, Line Edge Roughness, And Micro-Trenching In Nano-Scale Interconnect Structures For 45 Node Reactive Ion Etching Process
01:50 PM
(258e) Reaction Mechanisms In Patterning Hafnium-Based Metal Oxide Thin Films
02:10 PM
(258f) Plasma Activation Of Polymer Surfaces For Enhanced Adhesion
02:30 PM
(258g) Investigation Of Physical Vapor Deposited Ta / W Multilayer Structure As A Copper Diffusion Barrier
