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Proceedings
2007 Annual Meeting
Materials Engineering and Sciences Division
Plasma Processing
(258e) Reaction Mechanisms In Patterning Hafnium-Based Metal Oxide Thin Films
2007 Annual Meeting
(258e) Reaction Mechanisms In Patterning Hafnium-Based Metal Oxide Thin Films
Authors
Ryan M. Martin - Presenter
, University of California
Hans-Olof Blom - Presenter
, Uppsala University