2007 Annual Meeting
(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films
Authors
Asad Iqbal - Presenter, University of Arizona
Junpin Yao - Presenter, University of Arizona
Harpreet Juneja - Presenter, The University of Arizona
Farhang Shadman - Presenter, University of Arizona
Roger P Sperline - Presenter, The University of Arizona