2007 Annual Meeting
(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films
Authors
Iqbal, A. - Presenter, University of Arizona
Yao, J. - Presenter, University of Arizona
Juneja, H. - Presenter, The University of Arizona
Shadman, F. - Presenter, University of Arizona
Sperline, R. P. - Presenter, The University of Arizona