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2007 Annual Meeting

(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films

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Individuals

AIChE Pro Members	150.00
AIChE Graduate Student Members	Free
AIChE Undergraduate Student Members	Free
AIChE Explorer Members	225.00
Non-Members	225.00

Authors

Asad Iqbal - Presenter, University of Arizona

Junpin Yao - Presenter, University of Arizona

Harpreet Juneja - Presenter, The University of Arizona

Farhang Shadman - Presenter, University of Arizona

Roger P Sperline - Presenter, The University of Arizona