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Proceedings
Authors
Patil, S.

Juneja, H.

Affiliation

The University of Arizona

City

Tucson

State

AZ

Country

United States

Authored

(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films

2007 Annual Meeting

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2007 Annual Meeting

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