2007 Annual Meeting

Session: Reaction Kinetics In Electronic Materials Processing

Chair

Heath Turner, University of Alabama

Presentations

12:30 PM

(446a) Defect Engineering For Ultrashallow Junctions Using Surfaces
Charlotte Kwok, Ramakrishnan Vaidyanathan, S.H. Yeong, M. P. Srinivasan, B. Colombeau, L. Chan

12:50 PM

(446b) Atomic-Scale Analysis Of The Role Of Surface Cordination Defects In The Growth Of Amorphous Silicon Thin Films
Mayur S. Valipa, Tejinder Singh, Dimitrios Maroudas

01:10 PM

(446c) Ab-Initio Study on Zinc Sulfide Formation Mechanism in A Cvd Reactor
Yousef Sharifi

01:30 PM

(446d) Hot Wire Chemical Vapor Deposition Kinetics For Germanium Nanoparticle Growth On Extended And Patterned Hafnia Surfaces
John Ekerdt, Shawn S Coffee

01:50 PM

(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films
Asad Iqbal, Junpin Yao, Harpreet Juneja, Farhang Shadman, Roger P Sperline

02:10 PM

(446f) Reaction Rates And Mechanism For The Deposition Of Ruthenium Thin Films From Supercritical Carbon Dioxide
Christos F. Karanikas, James J. Watkins

02:30 PM

(446g) Study of Low-K Film Repair and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide
Eduardo Vyhmeister, Anthony J. Muscat, David Suleiman