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Publications
Proceedings
CCPS 17th Annual International Conference and Workshop Risk, Reliability, and Security
General Submissions
TECHNICAL PAPERS
Selective Catalytic Reduction (SCR) System Design and Operations: Quantitative Risk Analysis of Options
2007 Annual Meeting
Session: Reaction Kinetics In Electronic Materials Processing
Chair
Turner, H.
, University of Alabama
Presentations
12:30 PM
(446a) Defect Engineering For Ultrashallow Junctions Using Surfaces
12:50 PM
(446b) Atomic-Scale Analysis Of The Role Of Surface Cordination Defects In The Growth Of Amorphous Silicon Thin Films
01:10 PM
(446c) Ab-Initio Study on Zinc Sulfide Formation Mechanism in A Cvd Reactor
01:30 PM
(446d) Hot Wire Chemical Vapor Deposition Kinetics For Germanium Nanoparticle Growth On Extended And Patterned Hafnia Surfaces
01:50 PM
(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films
02:10 PM
(446f) Reaction Rates And Mechanism For The Deposition Of Ruthenium Thin Films From Supercritical Carbon Dioxide
02:30 PM
(446g) Study of Low-K Film Repair and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide
