Shadman, F.

Authored

(217d) Fate of Inorganic Oxide Nanoparticles in Semiconductor Manufacturing Effluents During Activated Sludge Treatment

2010 Annual Meeting

Sustainability Challenges and Opportunities in Nanoelectronics Manufacturing -

The 1st International Congress on Sustainability Science and Engineering

(446e) In-Situ Characterization of Dynamics of Impurity Absorption and Outgassing in Porous Low-K Dielectric Thin Films

2007 Annual Meeting

(369c) Removal of Nanoparticles In Semiconductor Manufacturing Effluents Using Porous Media Filtration

2011 Annual Meeting

(425d) Lowering Material and Energy Usage During Purging Ultra-High-Purity Gas Distribution Systems

2009 Annual Meeting

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