2007 Annual Meeting

Session: Interfacial Phenomena in Microfluidics, Mems, and Semiconductor Processing

Chair

Sammy S. Datwani, Labcyte Inc.

Co-Chair

Noshir S. Pesika, University of California

Presentations

08:30 AM

(539a) Mems Sensors With Chemically Selective Coatings Of Ionic Liquids
Eunhyea Chung, Nickolay Lavrik, Panos Datskos, Sheng Dai

08:50 AM

(539b) Microchannel Gas-Liquid Interface As Hydrogen Fuel Cell And Sensor
Ilwhan Oh, Rich I. Masel

09:10 AM

(539c) Relating Interfacial Vapor Void Phenomena And Fluid Actuation In Hydrophobic Microfluidic Devices Using Electrokinetic And Atomic Force Microscopy Characterization
Vishal Tandon, Sharath Bhagavatula, Aditya Sharma, Brian J. Kirby

09:30 AM

(539d) Aging of Self-Assembled Monolayers for Anti-Stiction Coatings Studied by near Edge X-Ray Absorption Fine Structure
Robert J. Klein, Daniel Fischer, Joseph Lenhart

09:50 AM

(539e) Impact Of Magnesium Oxide Interlayer On Heteroepitaxial Growth Of Barium Ferrite On Wide Bandgap Semiconductor 6H-Sic
Zhuhua Cai, Trevor L. Goodrich, Zhaohui Chen, Vince Harris

10:10 AM

(539f) Hybrid Inorganic-Organic Microparticles for Chemical Mechanical Polishing
Cecil Coutinho, Subrahmanya Mudhivarthi, Ashok Kumar

10:30 AM

(539g) Electrochemical Impedance Studies Of Copper Surface Reactions During Chemical Mechanical Planarization
Bum Soo Kim