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2007 Annual Meeting

(539g) Electrochemical Impedance Studies Of Copper Surface Reactions During Chemical Mechanical Planarization

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AIChE Pro Members	150.00
AIChE Graduate Student Members	Free
AIChE Undergraduate Student Members	Free
AIChE Explorer Members	225.00
Non-Members	225.00

Author

Bum Soo Kim - Presenter, Purdue University