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Proceedings
2007 Annual Meeting
Engineering Sciences and Fundamentals
Interfacial Phenomena in Microfluidics, Mems, and Semiconductor Processing
(539g) Electrochemical Impedance Studies Of Copper Surface Reactions During Chemical Mechanical Planarization

2007 Annual Meeting

(539g) Electrochemical Impedance Studies Of Copper Surface Reactions During Chemical Mechanical Planarization

Proceedings

2007 Annual Meeting

Conference Type

AIChE Annual Meeting

Conference Year

2007

CD Version

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Group

Engineering Sciences and Fundamentals

Session

Interfacial Phenomena in Microfluidics, Mems, and Semiconductor Processing

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List Price	225.00
AIChE Pro Members	150.00
AIChE Graduate Student Members	Free
AIChE Undergraduate Student Members	Free

Author

Bum Soo Kim - Presenter, Purdue University

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