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Proceedings
Authors
Amanchukwu, C.
Demkov, A.
Authored
(289a) Crystalline SrHfO3 Grown Directly on Ge (001) By Atomic Layer Deposition for High-k Gate Oxides in Ge-Based Transistors
2014 AIChE Annual Meeting (ISBN: 978-0-8169-1086-1)
Related Proceedings
2014 AIChE Annual Meeting
