2014 AIChE Annual Meeting
(289a) Crystalline SrHfO3 Grown Directly on Ge (001) By Atomic Layer Deposition for High-k Gate Oxides in Ge-Based Transistors
Authors
Ekerdt, J. G. - Presenter, University of Texas at Austin
McDaniel, M. D., University of Texas at Austin
Ngo, T., University of Texas at Austin