2014 AIChE Annual Meeting

(289a) Crystalline SrHfO3 Grown Directly on Ge (001) By Atomic Layer Deposition for High-k Gate Oxides in Ge-Based Transistors

Authors

John G. Ekerdt - Presenter, University of Texas at Austin
Martin D. McDaniel, University of Texas at Austin
Thong Ngo, University of Texas at Austin