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- (615e) Multivariate Statistical Process Monitoring Based On Statistics Pattern Analysis
In this paper, a window-based SPA method is proposed to address the challenges associated with continuous processes such as nonlinear process dynamics. First, the details of the window-based SPA method are presented, then the basic properties of the SPA method for fault detection are discussed and illustrated using a simple nonlinear example. Finally, the potential of the window-based SPA method in monitoring continuous processes is explored using two case studies (a 2 by 2 linear dynamic process and the challenging Tennessee Eastman process [8-10]).
The performance of the window-based SPA method is compared with the benchmark PCA and DPCA methods [5-7]. With additional information other than variance-covariance structure extracted from the process data, the SPA method is able to detect faults that are difficult or cannot be detected by the traditional PCA and DPCA methods. These case studies demonstrate that the SPA method detects various faults more efficiently than the PCA and DPCA methods. In particular, it is able to handle nonlinear process, to detect changes in the system eigenstructure, and to detect subtle changes in various dynamic systems.
1. He Q.P. and Wang J. Statistics Pattern Analysis and Its Application to Semiconductor Process Monitoring, AIChE Annual Meeting, November 8-13, 2009. Nashville, TN
2. He, Q. P.; Wang, J. Statistics Pattern Analysis - A New Process Monitoring Framework and Its Application to Semiconductor Batch Processes, AIChE J. 2010, in press.
3. Qin, S. J. Statistical process monitoring: basics and beyond. J. Chemometrics 2003, 17, 480?502
4. Luo, R.; Misra, M.; Himmelblau, D. M. Sensor fault detection via multiscale analysis and dynamic PCA. Ind. Eng. Chem. Res. 1999, 38, 1489?1495
5. Nomikos, P.; MacGregor, J. Monitoring of batch processes using multiway principal component. AIChE J. 1994, 40, 1361?1375.
6. Kourti, T.; Lee, J.; MacGregor, J. Experiences with industrial applications of projection methods for multivariate statistical process control. Comput. Chem. Eng. 1996, 20, S745?S750.
7. Ku, W.; Storer, R.; Georgakis, C. Disturbance detection and isolation by dynamic principal component analysis. Chemometrics Intell. Lab. Syst. 1995, 30, 179.
8. Downs, J. J.; Vogel, E. F. A plant-wide industrial process control problem. Comput. Chem. Eng. 1993, 17, 245?255.
9. Lyman, P. R.; Georgakis, C. Plant-wide control of the Tennessee Eastman problem. Comput. Chem. Eng. 1995, 19, 321?331.
10. Chiang, L. H.; Russell, E. L.; Braatz, R. D. Fault Detection and Diagnosis in Industrial Systems; Springer: London, 2001.