2008 Annual Meeting

Session: Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin

Topics in Plasma Science and Thin Film Applications I - In Honor of Herbert H. Sawin

Chair

Chang, J. P., University of California at Los Angeles

Co-Chair

Agarwal, S., Colorado School of Mines

Presentations

08:30 AM

(56a) Past and Future of Modeling and Simulation for Plasma Processing

09:05 AM

(56b) Atomistic Simulations of Feature Scale Etch Profile Evolution

09:40 AM

(56c) Overcoming Patterning Challenges at the 32 Nm Nodes

10:10 AM

(56d) From the Sawin Lab to NASA: Uses of Very Long Vacuum Tubes

10:40 AM

(56e) Highlights on Plasma-Surface Interactions – Honoring the Distinguished Career of Herbert H. Sawin