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Publications
Proceedings
2008 Annual Meeting
Materials Engineering and Sciences Division
Topics in Plasma Science and Thin Film Applications I - in Honor of Herbert H. Sawin
(56c) Overcoming Patterning Challenges at the 32 Nm Nodes
2008 Annual Meeting
(56c) Overcoming Patterning Challenges at the 32 Nm Nodes
Author
Mahorowala, A. - Presenter
, IBM
Overcoming Patterning Challenges at the 32 nm Nodes
