2007 Annual Meeting

(194b) Multivariate Batch Process Monitoring Utilizing Summary Variables with An Application to Semiconductor Etch

Authors

Neal B. Gallagher - Presenter, Eigenvector Research, Inc.
Barry M. Wise - Presenter, Eigenvector Research, Inc.
Jeremy M. Shaver - Presenter, Eigenvector Research, Inc.
Robert T. Roginski - Presenter, Eigenvector Research, Inc.
R. Scott Koch - Presenter, Eigenvector Research, Inc.