2007 Annual Meeting
(194b) Multivariate Batch Process Monitoring Utilizing Summary Variables with An Application to Semiconductor Etch
Authors
Gallagher, N. B. - Presenter, Eigenvector Research, Inc.
Wise, B. M. - Presenter, Eigenvector Research, Inc.
Shaver, J. M. - Presenter, Eigenvector Research, Inc.
Roginski, R. T. - Presenter, Eigenvector Research, Inc.
Koch, R. S. - Presenter, Eigenvector Research, Inc.