Kondratenko, Y.

Authored

(460b) Quantifying the Effects of near-Surface Diffusion and Electrical Activation of Boron in Silicon

2010 Annual Meeting

(168c) Defect Engineering for Ultra-Shallow Junctions Using Solid-Solid Interfaces

2009 Annual Meeting

(53d) New Mechanism for Optically Stimulated Diffusion in Ultra-Shallow Junction Formation

2009 Annual Meeting

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