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Authors
Patil, S.

Young, W. W.

Affiliation

University of Minnesota

City

Minneapolis

State

MN

Country

United States

Authored

(196aa) High-? Block Copolymers with High Etch Selectivity for Sub-10 Nm Patterning

2017 Annual Meeting (ISBN: 978-0-8169-1102-8)

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2017 Annual Meeting

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