Yun, S.

Authored

(433b) Time-Series Modeling for Run-to-Run Control of an Area-Selective Atomic Layer Deposition Process
2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)
(692g) Evaluating Hydrodynamic and Homogeneous Buffer Reaction Effects on the Electrochemical Hydrogen Evolution Reaction Using Experimentally Validated CFD Simulations
2023 AIChE Annual Meeting (ISBN: 978-0-8169-1120-2)
(430d) Computational Fluid Dynamics Simulation of Hydrodynamics in a Rotating Cylinder Electrode Reactor: Understanding Mass Transport Effects in Electrocatalysis
2022 Annual Meeting (ISBN: 978-0-8169-1118-9)
(484f) Operation and Control of Spatial Atomic Layer Etching Process
2022 Annual Meeting (ISBN: 978-0-8169-1118-9)
(623h) Multiscale Computational Fluid Dynamics Modeling of Spatial Atomic Layer Etching for Aluminum Oxide Thin Films
2022 Annual Meeting (ISBN: 978-0-8169-1118-9)
(689e) Multivariable Run-to-Run Control of Thermal Atomic Layer Etching of Aluminum Oxide Thin Films
2022 Annual Meeting (ISBN: 978-0-8169-1118-9)
(434e) Integration of Feedback Control and Run-to-Run Control for Plasma Enhanced Atomic Layer Deposition of Hafnium Oxide Thin Films
2021 Annual Meeting (ISBN: 978-0-8169-1116-5)

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