Pinge, S.

Authored

(417i) Evaluation of Three-Dimensional Line-Edge Roughness of Pre-and Post-Dry Etched Line and Space Patterns of Block-Copolymer Lithography

2018 AIChE Annual Meeting (ISBN: 978-0-8169-1108-0)

(576b) Examination of Line Edge Roughness of Directed Self-Assembled Block Copolymers: A Coarse-Grained Molecular Dynamics Study

2017 Annual Meeting (ISBN: 978-0-8169-1102-8)

Related Proceedings

2017 Annual Meeting 2018 AIChE Annual Meeting