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Publications
Proceedings
2020 Virtual Spring Meeting and 16th GCPS
Process Development Division
Sponsored Technology Workshop - Extract More Value From Your Existing Simulation Software Today - Chemstations
Xu, R.
Authored
(113d) Atomic Layer Deposition of HfO2, TiO2 and HfxTi1-xO2 Nano-Scale Films by Using Metal Precursors and H2O
2010 Annual Meeting
(113e) Atomic Layer Deposition and Characterization of Erbium Oxide Thin Films On Si(100) Using (CpMe)3Er Precursor and Ozone
2010 Annual Meeting
(604b) Atomic Layer Deposition and Characterization of ErxTi1-XOy Films
2011 Annual Meeting
Related Proceedings
2010 Annual Meeting
2011 Annual Meeting
