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  • Patil, S.

Xiong, R.

Affiliation
Georgia Institute of Technology
City
Atlanta
State
GA
Country
United States

Authored

(317e) Observability Analysis of Effective Medium Model and Its Application in Real-Time Sensing for Chemical Vapor Deposition
2007 Annual Meeting
(374a) Real-Time Characterization of Ysz Film during Chemical Vapor Deposition Using an Extended Kalman Filter Based Soft Sensor
2005 Annual Meeting

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