Tao, Sr., Q.

Authored

(113d) Atomic Layer Deposition of HfO2, TiO2 and HfxTi1-xO2 Nano-Scale Films by Using Metal Precursors and H2O

2010 Annual Meeting

(113e) Atomic Layer Deposition and Characterization of Erbium Oxide Thin Films On Si(100) Using (CpMe)3Er Precursor and Ozone

2010 Annual Meeting

(82u) Influence of Yttrium Doping Into Hafnium Dioxide on Film Structure and Dielectric Properties

2011 Spring Meeting & 7th Global Congress on Process Safety

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2010 Annual Meeting 2011 Spring Meeting & 7th Global Congress on Process Safety