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Publications
Proceedings
Authors
Patil, S.
Anderson, N. D.
Authored
(387c) A Theoretical Model Based on a Group Contribution Method to Describe Atomic Layer Deposition of Zirconia on Silicon
2019 AIChE Annual Meeting (ISBN: 978-0-8169-1112-7)
(596e) Selective Atomic Layer Deposition of Zirconia on Electroplated Copper Substrates
2019 AIChE Annual Meeting (ISBN: 978-0-8169-1112-7)
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2019 AIChE Annual Meeting
