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Publications
Proceedings
Authors
Ort, D.
Economou, D. J.
Authored
(56a) Past and Future of Modeling and Simulation for Plasma Processing
2008 Annual Meeting
(351d) Experimental Diagnostics and Modeling of Microplasma Discharges
2006 AIChE Annual Meeting
(698e) Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
2006 AIChE Annual Meeting
Related Proceedings
2006 AIChE Annual Meeting
2008 Annual Meeting
