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Publications
Proceedings
Authors
Amanchukwu, C.
Lee, C.
Authored
(602e) Performance Of Advanced Resists Based On Polymer-Bound Pag Resins
2007 Annual Meeting
(142bg) Photoacid Diffusion in Photoresist Polymer Thin Films: Approaches for Measurement and Control of Thin Film Acid Diffusion
2005 Annual Meeting
Related Proceedings
2005 Annual Meeting
2007 Annual Meeting
