2011 Spring Meeting & 7th Global Congress on Process Safety
(66d) Coupled Electrostatic and Pneumatic Microvalves for Portable Chemical Microsystems
Authors
Tice, J. D. - Presenter, University of Illinois at Urbana-Champaign
Desai, A. V. - Presenter, University of Illinois at Urbana-Champaign
Bassett, T. A. - Presenter, University of Illinois at Urbana-Champaign
Kenis, P. J. A. - Presenter, University of Illinois, Urbana Champaign
Apblett, C. A. - Presenter, Sandia National Laboratories
We report the design, fabrication, and testing of an electrostatically actuated microvalve made exclusively with soft-lithographic techniques that can be utilized to route pressure to pneumatic actuators on portable chemical microsystems.