2011 Spring Meeting & 7th Global Congress on Process Safety

(66d) Coupled Electrostatic and Pneumatic Microvalves for Portable Chemical Microsystems

Authors

Joshua D. Tice - Presenter, University of Illinois at Urbana-Champaign
Amit V. Desai - Presenter, University of Illinois at Urbana-Champaign
Thomas A. Bassett - Presenter, University of Illinois at Urbana-Champaign
Paul J. A. Kenis - Presenter, University of Illinois, Urbana Champaign
Christopher A. Apblett - Presenter, Sandia National Laboratories


We report the design, fabrication, and testing of an electrostatically actuated microvalve made exclusively with soft-lithographic techniques that can be utilized to route pressure to pneumatic actuators on portable chemical microsystems.