With the goal of enhancing the throughput of microfluidic emulsification of polymerizable liquids, we explore the creation of microfluidic devices in cyclo olefin polymers via hot embossing (HE) by using photoresist-based stamps. Photoresist-based stamps are advantageous because they can be robust enough for repeated use; they are inexpensive and are fast to make; they can support feature sizes down to hundreds of nanometers and are created by photolithography.
This work reviews the process for making SU-8 stamps and characterizes their durability.
