(29a) Technology and Emerging Applications Using Low Temperature Plasmas

Plasmas have broad applications in materials processing, such as etching, deposition and sterilization. An overview of various methods of producing low temperature plasmas will be presented, and will include a review of the physics and chemistry of radio frequency (RF) and microwave (MW) generated discharges. Included in the review will be a discussion of the electrical and chemical characteristics of atmospheric and low-pressure plasma, plasma stability and uniformity. Emerging applications for these technologies will also be reviewed, and compared with conventional processing techniques.