(571j) Highly Porous Coatings of Metal Nitrides on Electronic Circuitry for Sensing Applications

Molecular sensing is important for medical diagnostics, environmental monitoring and food safety [1]. Metal nitrides are an emerging class of materials that feature promising surface properties for the chemoresistive sensing of gases at low temperature. Yet, the template-free deposition of thin, porous metal nitride coatings is a challenge, motivating the design of novel processes. Here, we will present a new pathway to design highly porous (>90%) metal nitrides coatings on electronic circuitry by combining aerosol deposition and a subsequent dry conversion [2]. We will demonstrate close control over process parameters that affect film morphology, as monitored in situ by measuring the coatings resistance. The obtained coatings is rather homogeneous and consist of a network of fine and highly crystalline nanoparticles (crystal size ~15 nm), as revealed by X-ray diffraction and Scanning Electron Microscopy. To demonstrate immediate practical impact, we will show the selective sensing of NO₂, a major pollutant, down to few parts-per-billion concentration at room temperature.

References:

1. Güntner, A.T.; Pineau, N. J. & Pratsinis, S.E., Energ. Combust. Sci. 2022, 90, 100992.
2. Güntner, A.T.; Wied, M.; Pineau, N.J.; Pratsinis, S.E., Sci. 2020, 7 (7), 1903390.