(383x) Preparation of Porous Carbon Adsorbents Derived from Cpvc and Their Application for Greenhouse Gas Capture

As the semiconductor industry continues to grow steadily, emissions of carbon tetrafluoride (CF₄), one of the specialty gases used in semiconductor production processes, are increasing. CF₄ is a highly stable gas with an atmospheric lifetime of 50,000 years, and it is a potent greenhouse gas that has a global warming potential (GWP) 6,500 times higher than carbon dioxide (CO₂), accelerating global warming. To address environmental issues such as climate change and ecosystem disruption caused by CF₄ emissions, regulations on CF₄ emissions are being strengthened annually. Current methods to reduce atmospheric emissions of CF₄ typically involve high-energy processes, such as thermal of plasma-based decomposition of non-dispersible perfluorocompounds (PFCs), which require high energy consumption and additional post-treatment for decomposition of by-products such as HF, F₂, SiF₄, etc. More efficient and effective methods for CF₄ emission reduction and treatment are needed. In this study, a porous carbon adsorbent based on chlorinated polyvinyl chloride (CPVC) was prepared and applied for CF₄ adsorption.