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Proceedings
2014 AIChE Annual Meeting
Materials Engineering and Sciences Division
Nanostructured Polymer Films
(274c) Closed Batch iCVD of Ultra-Thin and Conformal Polymer Films
2014 AIChE Annual Meeting
(274c) Closed Batch iCVD of Ultra-Thin and Conformal Polymer Films
Authors
Chen, N. - Presenter
, MIT
Petruczok, C. D.
, Massachusetts Insitute of Technology
Gleason, K. K.
, Massachusetts Institute of Technology
