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Proceedings
2014 AIChE Annual Meeting
Materials Engineering and Sciences Division
Nanostructured Polymer Films
(274c) Closed Batch iCVD of Ultra-Thin and Conformal Polymer Films
2014 AIChE Annual Meeting
(274c) Closed Batch iCVD of Ultra-Thin and Conformal Polymer Films
Authors
Nan Chen - Presenter
, MIT
Christy D. Petruczok
, Massachusetts Insitute of Technology
Karen K. Gleason
, Massachusetts Institute of Technology
