2013 AIChE Annual Meeting
Session: Gas Phase Deposition Processes
Gas phase deposition includes a wide variety of thin film growth technologies, including physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), and molecular beam epitaxy (MBE), as well as several other methods included within these broad topics. This session welcomes both experimental as well as theoretical contributions in this area.
Chair
Malancha Gupta, University of Southern California
Co-Chair
Xinhua Liang, Missouri University of Science & Technology