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- 2013 AIChE Annual Meeting
- Materials Engineering and Sciences Division
- Gas Phase Deposition Processes
Gas phase deposition includes a wide variety of thin film growth technologies, including physical vapor deposition (PVD), chemical vapor deposition (CVD), atomic layer deposition (ALD), and molecular beam epitaxy (MBE), as well as several other methods included within these broad topics. This session welcomes both experimental as well as theoretical contributions in this area.