(152b) Tom Edgar's Contributions to the Semiconductor Industry: From Controlling Processes to Technology Development

Dr. Edgar's research and students have influenced the semiconductor industry in several ways. Their original impact was the introduction of control theory and reactor modeling to the semiconductor industry for use in improving unit processes. From these beginnings, his effect on the industry expanded as his students extended their roles into factory scheduling, process loop control, equipment design, and even managing technology development. Examples of Tom's work and influence will be highlighted in this presentation for the purpose of demonstrating its breadth. In addition, this paper will demonstrate how the control concepts taught by Dr. Edgar also apply when developing and productizing semiconductor process and package technology.