2009 Annual Meeting

Session: Semiconductor Surface Chemistry

Presentations

03:15 PM

(168a) Particle Adhesion in Microelectronics Processing
Caitlin Kilroy

03:40 PM

(168b) RHEED-TRAXS Development for Real Time, in-Situ Stoichiometry Analysis During Thin Film Deposition
Bing Sun, Zhuhua Cai, Martina List

04:05 PM

(168c) Defect Engineering for Ultra-Shallow Junctions Using Solid-Solid Interfaces
Prashun Gorai, Yevgeniy Kondratenko

04:30 PM

(168d) Chemical Mechanisms of Interface Degradation Between Barium Hexaferrite Thin Films On Wide Bandgap 6H-SiC
Zhuhua Cai, Trevor L. Goodrich, Zhaohui Chen, Vince Harris, Bing Sun