2009 Annual Meeting

Session: Plasma Science and Processing

Chair

Sang M. Han, University of New Mexico

Presentations

08:30 AM

(378a) Mechanism for Surface Activation of Aromatic Polymers with Atmospheric Pressure Plasmas
Eleazar Gonzalez, Michael Barankin, Peter C. Guschl, Robert F. Hicks

08:55 AM

(378b) Sterilization of Surfaces with a Handheld Atmospheric Pressure Plasma
Sara B. Habib, R. F. Hicks, Eleazar Gonzalez, Mark Sloan, A. Tijerina

09:20 AM

(378c) Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide: Reaction Mechanism Studies Using Attenuated Total Reflection Fourier Transform Infrared Spectroscopy
Vikrant R. Rai, Sumit Agarwal

09:45 AM

(378d) Diagnostic Study of An Arc Plasma Jet Under Atmospheric Pressure and Its Applications to Materials Processing
Chengyi Wu, Yaowen Hsu, Yaojhen Yang

10:10 AM

(378e) First-Principles-Based Kinetic Modeling of Surface Growth During Plasma Deposition of Silicon Thin Films
Sumeet C. Pandey, Tejinder Singh, Dimitrios Maroudas

10:35 AM

(378f) Feature Profile Evolution: From Plasma Etching and Deposition to Surface Roughness Propagation
John Hoang