2008 Annual Meeting

Session: Topics in Plasma Science and Thin Film Applications III - in Honor of Herbert H. Sawin

Topics In Plasma Science and Thin Film Applications III - In Honor of Herbert H. Sawin

Chair

Chang, J. P., University of California at Los Angeles

Co-Chair

Agarwal, S., Colorado School of Mines

Presentations

03:15 PM

(183a) Plasma Etching for Metal Gate Electrode Fabrication in Conventional and Sub-Threshold Transistor Integration

03:45 PM

(183b) Interface Preparation for High Mobility Substrates

04:15 PM

(183c) Applying Lessons Learned from An Etching Lab: The Role of O Atoms In PECVD

04:45 PM

(183d) Polymer Nano-Texturing and Stochastic Nano-Patterning Using Plasma Processing

05:15 PM

(183e) CMP Pad Surface Analysis and the Components of Pad Surface Texture