2008 Annual Meeting

Session: Topics in Plasma Science and Thin Film Applications III - in Honor of Herbert H. Sawin

Topics In Plasma Science and Thin Film Applications III - In Honor of Herbert H. Sawin

Chair

Jane P. Chang, University of California at Los Angeles

Co-Chair

Sumit Agarwal, Colorado School of Mines

Presentations

03:15 PM

(183a) Plasma Etching for Metal Gate Electrode Fabrication in Conventional and Sub-Threshold Transistor Integration
Steven A. Vitale, Jakub Kedzierski, Nisha Checka, Craig L. Keast

03:45 PM

(183b) Interface Preparation for High Mobility Substrates
Anthony J. Muscat

04:15 PM

(183c) Applying Lessons Learned from An Etching Lab: The Role of O Atoms In PECVD
Colin Wolden

04:45 PM

(183d) Polymer Nano-Texturing and Stochastic Nano-Patterning Using Plasma Processing
Evangelos Gogolides, Angeliki Tserepi, Nikos Vourdas, Maria Elena Vlachopoulou, Katerina Tsougeni, Dimitrios Kontziampasis

05:15 PM

(183e) CMP Pad Surface Analysis and the Components of Pad Surface Texture
Andrew S. Lawing