2008 Annual Meeting

Session: Topics in Plasma Science and Thin Film Applications II- in Honor of Herbert H. Sawin

Topics in Plasma Science and Thin Film Applications II - In Honor of Herbert H. Sawin

Chair

Jane P. Chang, University of California at Los Angeles

Co-Chair

Sumit Agarwal, Colorado School of Mines

Presentations

12:30 PM

(127a) Plasma-Induced Structural Transitions In Materials
Eray S. Aydil, Michael J. Behr

01:05 PM

(127b) Herb Sawin and DuPont: 25 Years of Cooperative Research and Development
Michael Mocella

01:40 PM

(127c) Modeling Plasma-Surface Interactions and Their Role in Inducing Structural Transitions
Dimitrios Maroudas

02:15 PM

(127d) Reaction Mechanisms in Plasma Etching of High-K Materials
Jane P. Chang

02:45 PM

(127e) Reception to AIChE Area 8e Special Symposium
Jane P. Chang