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Proceedings
2007 Annual Meeting
Engineering Sciences and Fundamentals
Thin Films, Coatings and Interfacial Phenomena Using near and Supercritical Fluids
2007 Annual Meeting
Session: Thin Films, Coatings and Interfacial Phenomena Using near and Supercritical Fluids
Chair
M.P. Srinivasan
, National University of Singapore
Co-Chair
Christopher L. Kitchens
, Clemson University
Presentations
08:30 AM
(562a) In-Situ Ftir Analysis Of Porous Low-K Film Repair
Eduardo Vyhmeister, David Suleiman, Anthony J. Muscat
09:05 AM
(562b) Investigating The Effect Of Gold Nanoparticle Deposition Via CO2-Expanded Liquids On Micromachine Reliability
Kendall M. Hurst, W. Robert Ashurst
09:40 AM
(562c) Deposition Of Conformal Metal Oxide Films In Supercritical Carbon Dioxide
Eunyoung You, Adam O'Neil
10:15 AM
(562d) Nanostructured Ultrathin Films Formed By Covalent Molecular Assembly In Supercritical Carbon Dioxide
M. P. Srinivasan, Sreenivasa Reddy Puniredd
