2006 AIChE Annual Meeting

Session: Simulation and Control of Electronic Materials Manufacturing Processes

The session introduces novel simulation and control techniques applied to electronic materials manufacturing processes.

Chair

Salinger, A., Sandia National Laboratories

Co-Chair

Adomaitis, R., University of Maryland

Presentations

03:15 PM

(698a) On State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model
Wang, J., He, Q.

03:40 PM

(698b) Modeling and Control of the Gradient Freeze Method of Crystal Growth
Lun, L., Yeckel, A., Daoutidis, P., Derby, J. J.

04:05 PM

(698c) Combining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems
Xenidou, T. C., Boudouvis, A. G., Markatos, N.

04:30 PM

(698d) System Identification and Model Predictive Control of Microstructure during Thin-Film Growth
Varshney, A., Armaou, A.

04:55 PM

(698e) Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
Tatavalli Mittadar, N., Nikolaou, M., Economou, D. J.

05:20 PM

(698f) Effects of Temperature and Structural Defects on the Theoretical Strength of
Djohari, H., Milstein, F., Maroudas, D.