2006 AIChE Annual Meeting

Session: Simulation and Control of Electronic Materials Manufacturing Processes

The session introduces novel simulation and control techniques applied to electronic materials manufacturing processes.

Chair

Andrew Salinger, Sandia National Laboratories

Co-Chair

Ray Adomaitis, University of Maryland

Presentations

03:15 PM

(698a) On State Estimation in the Low-Volume High-MIX Semiconductor Manufacturing Using a Singular Gauss-Markov Model
Jin Wang, Qinghua He

03:40 PM

(698b) Modeling and Control of the Gradient Freeze Method of Crystal Growth
Lisa Lun, Andrew Yeckel, Prodromos Daoutidis, Jeffrey J. Derby

04:05 PM

(698c) Combining a Legacy Cfd Code with an Evolutionary Algorithm to Perform Optimization Analysis of Chemical Vapor Deposition Systems
Theodora C. Xenidou, Andreas G. Boudouvis, Nicholas Markatos

04:30 PM

(698d) System Identification and Model Predictive Control of Microstructure during Thin-Film Growth
Amit Varshney, Antonios Armaou

04:55 PM

(698e) Building Non-Parametric Models for Rsm: a Bayesian Approach and Its Application to Plasma Etching
Nirmal Tatavalli Mittadar, Michael Nikolaou, Demetre J. Economou

05:20 PM

(698f) Effects of Temperature and Structural Defects on the Theoretical Strength of
Hadrian Djohari, Frederick Milstein, Dimitrios Maroudas