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Publications
Proceedings
2006 AIChE Annual Meeting
Computing and Systems Technology Division
Process Monitoring and Fault Detection I
2006 AIChE Annual Meeting
Session: Process Monitoring and Fault Detection I
Developments in process monitoring and fault detection.
Chair
S. Joe Qin
, The University of Texas at Austin
Co-Chair
Leo Chiang
, Dow Inc.
Presentations
12:30 PM
(92a) Process Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing
Jyh-Cheng Jeng, An-Jhih Su, Hsiao-Ping Huang, Cheng-Ching Yu
12:50 PM
(92b) Statistical Fault Detection of Batch Processes in Semiconductor Manufacturing
Qinghua He, Jin Wang
01:10 PM
(92c) Real-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation
Rentian Xiong, Martha Grover Gallivan
01:30 PM
(92d) Industrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging)
Leo Chiang, Lloyd Colegrove
01:50 PM
(92e) Evolving Models and a Pls Similarity Factor for Monitoring Batch Processes
Jon C. Gunther, Dale E. Seborg
02:10 PM
(92f) Bio-Reactor Monitoring with Multiway-Pca and Model Based-Pca
Yang Zhang, Thomas F. Edgar
02:30 PM
(92g) Variance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes
Jie Yu, S. Joe Qin
