2006 AIChE Annual Meeting

Session: Process Monitoring and Fault Detection I

Developments in process monitoring and fault detection.

Chair

S. Joe Qin, The University of Texas at Austin

Co-Chair

Leo Chiang, Dow Inc.

Presentations

12:30 PM

(92a) Process Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing
Jyh-Cheng Jeng, An-Jhih Su, Hsiao-Ping Huang, Cheng-Ching Yu

12:50 PM

(92b) Statistical Fault Detection of Batch Processes in Semiconductor Manufacturing
Qinghua He, Jin Wang

01:10 PM

(92c) Real-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation
Rentian Xiong, Martha Grover Gallivan

01:30 PM

(92d) Industrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging)
Leo Chiang, Lloyd Colegrove

01:50 PM

(92e) Evolving Models and a Pls Similarity Factor for Monitoring Batch Processes
Jon C. Gunther, Dale E. Seborg

02:10 PM

(92f) Bio-Reactor Monitoring with Multiway-Pca and Model Based-Pca
Yang Zhang, Thomas F. Edgar

02:30 PM

(92g) Variance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes
Jie Yu, S. Joe Qin