2006 AIChE Annual Meeting

Session: Process Monitoring and Fault Detection I

Developments in process monitoring and fault detection.

Chair

Qin, S. J., The University of Texas at Austin

Co-Chair

Chiang, L., Dow Inc.

Presentations

12:30 PM

(92a) Process Trend Monitoring Based on Key Sensitive Index: Applications Semiconductor Manufacturing
Jeng, J. C., Su, A. J., Huang, H. P., Yu, C. C.

12:50 PM

(92b) Statistical Fault Detection of Batch Processes in Semiconductor Manufacturing
He, Q., Wang, J.

01:10 PM

(92c) Real-Time Thin Film Characterization during Chemical Vapor Deposition Using Moving Horizon Estimation
Xiong, R., Grover Gallivan, M.

01:30 PM

(92d) Industrial Implementation of on-Line Multivariate Quality Control (Part II: Long-Term Performance, Model Maintenance, and Model Leveraging)
Chiang, L., Colegrove, L.

01:50 PM

(92e) Evolving Models and a Pls Similarity Factor for Monitoring Batch Processes
Gunther, J. C., Seborg, D. E.

02:10 PM

(92f) Bio-Reactor Monitoring with Multiway-Pca and Model Based-Pca
Zhang, Y., Edgar, T. F.

02:30 PM

(92g) Variance Component Analysis Based Fault Diagnosis of Multi-Layer Overlay Lithography Processes
Yu, J., Qin, S. J.