2005 Annual Meeting

Session: Thin Film Processing

Chair

Brett A. Cruden, NASA Ames Center for Nanotechnology

Presentations

12:30 PM

(380a) Multiscale Model for Plasma Enhanced Deposition on Nanostructures
Jerry Young, Curt Clemons, Alper Buldum, Kevin Kreider, Guanghai Zhang

12:48 PM

(380b) Molecular Vapor Deposition for Enhanced Monolayer Stability and Durability
W. Robert Ashurst, Jeff Chinn, B. Kobrin, V. Fuentes, R. Nowak, R. Yi

01:06 PM

(380c) Interface Formation and Energy Level Alignment of Pentacene on GaN
John J. Uhlrich

01:24 PM

(380d) Film Deposition on Electrostatically Suspended Nanowires by Pecvd in Dusty Plasma Reactor
Themis Matsoukas, Jin Cao

01:42 PM

(380e) Ion-Enhanced Plasma Etching of Metal Oxides in Chlorine Based Plasmas
Ryan M. Martin, Hans-Olof Blom

02:00 PM

(380f) Electron-Beam Hardening of Functionalized Polynorbornene Thin Films
Sue Ann Bidstrup Allen, Seongho Park, Paul A. Kohl

02:18 PM

(380g) Remote Oxygen Plasma Growth of Mgo Films on Sic for Functional Oxide Integration
Trevor L. Goodrich, Zhuhua Cai