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Publications
Proceedings
CCPS 17th Annual International Conference and Workshop Risk, Reliability, and Security
General Submissions
TECHNICAL PAPERS
Selective Catalytic Reduction (SCR) System Design and Operations: Quantitative Risk Analysis of Options
2005 Annual Meeting
Session: Simulation and Control of Electronic Materials Manufacturing Systems
Chair
Armaou, A.
, Pennsylvania State University
Presentations
12:30 PM
(375a) Using High Fidelity Simulation in the Design of Experiments for Optimizing Etch Uniformity in Plasma Etching Reactors
12:55 PM
(375b) Application of a Geometrically-Based Uniformity Criterion for Film Uniformity Optimization in a Planetary Gallium Nitride Cvd System
01:20 PM
(375c) Effects of Sampling Rate, Metrology Delay and Process Hold on the Stability of Run-to-Run Control
01:45 PM
(375d) A New Bayesian Approach for Improved State Estimation in Semiconductor Manufacturing Processes
02:10 PM
(375e) Pls Based Run-to-Run Controller
