2005 Annual Meeting

Session: Reactor Design and Analysis for Electronic Materials

Chair

Constantinos Theodoropoulos, University of Manchester

Co-Chair

Roger P. Pawlowski, Sandia National Laboratories

Presentations

12:30 PM

Welcoming Remarks

12:32 PM

(609a) Gallium Nitride Thin Film Growth Chemistry Modeling and Experimental Validation within a Movpe Reactor Showerhead System
Rinku P. Parikh, Raymond A. Adomaitis, Gary W. Rubloff, Erin Robertson, Deborah Partlow, Darren Thomson, Michael Aumer

12:57 PM

(609b) Development of Generalized Design Criteria for Vertical Chemical Vapor Deposition Reactors
Joungmo Cho, T. J. Mountziaris

01:22 PM

(609c) Computational Fluid Dynamics (CFD) Modeling of a Laser-Driven Aerosol Reactor
Yuanqing He, Suddha S. Talukdar, Mark T. Swihart

01:47 PM

(609d) Experimental Results from a Spatially Programmable Chemical Vapor Deposition System
Ramaswamy Sreenivasan, Raymond A. Adomaitis, Gary W. Rubloff, Yuhong Cai

02:12 PM

(609e) Non-Lithographic Micropatterning of Thin Crystal Film Layers and Bulk Micro-Machining Via Hydrogel Stamping
Stoyan K. Smoukov, Christopher J. Campbell, Kyle J.M. Bishop, Bartosz A. Grzybowski

02:37 PM

Concluding Remarks