2005 Annual Meeting

Session: Reactor Design and Analysis for Electronic Materials

Chair

Theodoropoulos, C., University of Manchester

Co-Chair

Pawlowski, R. P., Sandia National Laboratories

Presentations

12:30 PM

Welcoming Remarks

12:32 PM

(609a) Gallium Nitride Thin Film Growth Chemistry Modeling and Experimental Validation within a Movpe Reactor Showerhead System
Parikh, R. P., Adomaitis, R. A., Rubloff, G. W., Robertson, E., Partlow, D., Thomson, D., Aumer, M.

12:57 PM

(609b) Development of Generalized Design Criteria for Vertical Chemical Vapor Deposition Reactors
Cho, J., Mountziaris, T. J.

01:22 PM

(609c) Computational Fluid Dynamics (CFD) Modeling of a Laser-Driven Aerosol Reactor
He, Y., Talukdar, S. S., Swihart, M. T.

01:47 PM

(609d) Experimental Results from a Spatially Programmable Chemical Vapor Deposition System
Sreenivasan, R., Adomaitis, R. A., Rubloff, G. W., Cai, Y.

02:12 PM

(609e) Non-Lithographic Micropatterning of Thin Crystal Film Layers and Bulk Micro-Machining Via Hydrogel Stamping
Smoukov, S. K., Campbell, C. J., Bishop, K. J., Grzybowski, B. A.

02:37 PM

Concluding Remarks