2005 Annual Meeting

Session: Reaction Kinetics in Electronic Materials Processing

Chair

Bridget R. Rogers, Vanderbilt University

Presentations

08:00 AM

(586a) Controlling Ultrashallow Junction Formation through Surface Chemistry
Kapil Dev, Charlotte T. M. Kwok

08:20 AM

(586b) Directed Self Assembly of Si and Ge Nanocrystals on Hfo2 through Kinetically Driven Patterning
Scott K. Stanley, Sachin V. Joshi, Sanjay K. Banerjee, John Ekerdt

08:40 AM

(586c) Grain Focused Simulation of Zirconia Cvd
Max Bloomfield, Timothy S. Cale, Zhe Song, Bridget R. Rogers

09:00 AM

(586d) An Electrochemical Impedance Spectroscopy Study of Chloride and 3-Mercapto-1-Propanesulfonic Acid Interactions in Acidic Copper Electroplating Bath
Hung-Ming Chen, Alan Zdunek

09:20 AM

(586e) Characterization of Copper Chemical Mechanical Polishing in Nitric Acid Slurries
Moganty Surya Sekhar, S Ramanathan

09:40 AM

(586f) Decomposition Kinetics of Diethylzinc by Quantum Chemical Calculations
Young Seok Kim, Yong Sun Won, Tim J. Anderson

10:00 AM

(586g) Decomposition of Aryl- and Alkylimido Precursors for the Cvd of Tungsten Nitride: a Combined Density Functional Theory and Experimental Study
Yong Sun Won, Young Seok Kim, Tim J. Anderson, Lisa McElwee-White