2005 Annual Meeting

Session: Materials Synthesis and Processing with Supercritical Fluids II

Chair

Raashina Humayun, Novellus Systems Inc

Co-Chair

Rajesh N. Dave, New Jersey Institute of Technology

Presentations

03:15 PM

(546a) Development of Supported Nanoparticulate Metal Complexes Using Compressed Carbon Dioxide as Antisolvent
Chad A. Johnson, Bala Subramaniam, Sarika Sharma, A.s Borovik

03:40 PM

(546b) Reductive Deposition of Cerium Oxide Films in Carbon Dioxide
Adam O'Neil, James J. Watkins

04:05 PM

(546c) Synthesis of Metal Oxide Nanoaerogels Via a Sol-Gel Route in Supercritical CO2
Ruohong Sui, Amin S. Rizkalla, Paul A. Charpentier

04:30 PM

(546d) Copper Chelation for Microelectronic Interconnects in Supercritical Carbon Dioxide
Carol Bessel, Dorothy Skaf, Donna Omiatek, Laurel Grotzinger

04:55 PM

(546e) Copper Etching Using Hexafluoroacetylacetone (Hfach) Dissolved in Supercritical Co2: a Kinetic Investigation
Michael L. Durando, Anthony J. Muscat

05:20 PM

(546f) Comparative Study of Covalent Molecular Assembly of Oligoimide Ultrathin Films in Supercritical Carbon Dioxide and Liquid Solvent
Sreenivasa Reddy Puniredd, M. P. Srinivasan