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Proceedings
2005 Annual Meeting
Engineering Sciences and Fundamentals
Materials Synthesis and Processing with Supercritical Fluids II
2005 Annual Meeting
Session: Materials Synthesis and Processing with Supercritical Fluids II
Chair
Raashina Humayun
, Novellus Systems Inc
Co-Chair
Rajesh N. Dave
, New Jersey Institute of Technology
Presentations
03:15 PM
(546a) Development of Supported Nanoparticulate Metal Complexes Using Compressed Carbon Dioxide as Antisolvent
Chad A. Johnson, Bala Subramaniam, Sarika Sharma, A.s Borovik
03:40 PM
(546b) Reductive Deposition of Cerium Oxide Films in Carbon Dioxide
Adam O'Neil, James J. Watkins
04:05 PM
(546c) Synthesis of Metal Oxide Nanoaerogels Via a Sol-Gel Route in Supercritical CO2
Ruohong Sui, Amin S. Rizkalla, Paul A. Charpentier
04:30 PM
(546d) Copper Chelation for Microelectronic Interconnects in Supercritical Carbon Dioxide
Carol Bessel, Dorothy Skaf, Donna Omiatek, Laurel Grotzinger
04:55 PM
(546e) Copper Etching Using Hexafluoroacetylacetone (Hfach) Dissolved in Supercritical Co2: a Kinetic Investigation
Michael L. Durando, Anthony J. Muscat
05:20 PM
(546f) Comparative Study of Covalent Molecular Assembly of Oligoimide Ultrathin Films in Supercritical Carbon Dioxide and Liquid Solvent
Sreenivasa Reddy Puniredd, M. P. Srinivasan
