2005 Annual Meeting
(349a) Nucleation and Growth of Nanocrystalline Diamond Films
Author
Butler, J. - Presenter, Naval Research Laboratory
This talk will provide an overview of the NanoCrystalline Diamond (NCD) films. These are deposited by microwave plasma enhanced chemical vapor deposition at the Naval Research Laboratory. The overview will cover selected properties and the fabrication of micro/nano structures in this material.